"Micro-device array LED processes on CMOS/MEMS substrate."

Jian-Chiun Liou, Wen-De Lin (2017)

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DOI: 10.1109/NEMS.2017.8017133

access: closed

type: Conference or Workshop Paper

metadata version: 2017-09-07

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Jian-Chiun Liou, Wen-De Lin:
Micro-device array LED processes on CMOS/MEMS substrate. NEMS 2017: 776-779

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