"Fabrication of deep lateral single-crystal-silicon blaze micro-grating by ..."

Yu-Hsin Lin et al. (2012)

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DOI: 10.1109/NEMS.2012.6196869

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-15

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Yu-Hsin Lin, C. J. Weng, C. Y. Su, Wensyang Hsu:
Fabrication of deep lateral single-crystal-silicon blaze micro-grating by Inductively-Coupled-Plasma Reactive Ion Etch. NEMS 2012: 689-692

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