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"Fabrication of PZT thick film on platinum-coated silicon substrate by an ..."
Chun-I Lin, Yung-Chun Lee (2011)
- Chun-I Lin, Yung-Chun Lee:
Fabrication of PZT thick film on platinum-coated silicon substrate by an improved sol-gel deposition method. NEMS 2011: 567-570
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