"Fabrication of sub-40 nm nanofluidic channels using thin glass-glass bonding."

Yi-Kai Lin, Ju-Nan Kuo (2011)

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DOI: 10.1109/NEMS.2011.6017365

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Yi-Kai Lin, Ju-Nan Kuo:
Fabrication of sub-40 nm nanofluidic channels using thin glass-glass bonding. NEMS 2011: 351-354

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