"Undercut edges for robust capillary self-alignment in hybrid microassembly."

Ville Liimatainen, Veikko Sariola, Quan Zhou (2013)

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DOI: 10.1109/NEMS.2013.6559911

access: closed

type: Conference or Workshop Paper

metadata version: 2018-12-12

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Ville Liimatainen, Veikko Sariola, Quan Zhou:
Undercut edges for robust capillary self-alignment in hybrid microassembly. NEMS 2013: 1088-1091

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