"Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators."

Wenjun Liao et al. (2013)

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DOI: 10.1109/NEMS.2013.6559884

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-02

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  - conf/nems/LiaoLTWX13
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Wenjun Liao, Wenjing Liu, Yongming Tang, Baobing Wang, Huikai Xie:
Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators. NEMS 2013: 969-972

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