"Shape and thermal effects of metal films on stress-induced bending of ..."

Chen-Chieh Liao, Ju-Nan Kuo (2009)

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DOI: 10.1109/NEMS.2009.5068632

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Chen-Chieh Liao, Ju-Nan Kuo:
Shape and thermal effects of metal films on stress-induced bending of surface micromachined curved grating. NEMS 2009: 518-521

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