"A Micromachined Electrochemical Angular Accelerometer Based on ..."

Tian Liang et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451444

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type: Conference or Workshop Paper

metadata version: 2025-04-04

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  - conf/nems/LiangWCCLXQSCZD21
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Tian Liang, Junbo Wang, Deyong Chen, Jian Chen, Bowen Liu, Chao Xu, Wenjie Qi, Xu She, Mingwei Chen, Anxiang Zhong, Yumo Duan:
A Micromachined Electrochemical Angular Accelerometer Based on Interdigital Electrodes. NEMS 2021: 1813-1816

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