"Design and Fabrication of Integrated Piezoelectric Micropump with Vortex ..."

Boshen Liang et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451478

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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Boshen Liang, Louis Paquet, Yongbin Jeong, Paul Heremans, David Cheyns:
Design and Fabrication of Integrated Piezoelectric Micropump with Vortex Enhancement Optimization. NEMS 2021: 1423-1426

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