"A MEMS accelerometer with double-sided symmetrical folded-beams on single ..."

Wei Li et al. (2017)

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DOI: 10.1109/NEMS.2017.8017004

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-20

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Wei Li, Xiaofeng Zhou, Jian Wu, Youling Lin, Ze Wang, Lu feng Che:
A MEMS accelerometer with double-sided symmetrical folded-beams on single wafer. NEMS 2017: 194-197

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