"The realization of ZrOxNy temperature sensors with good sensitivity and ..."

Yanjie Li et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451523

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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  - conf/nems/LiYGLLL21
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Yanjie Li, Minmin You, Xun Gong, Xiu-Yan Li, Zude Lin, Jingquan Liu:
The realization of ZrOxNy temperature sensors with good sensitivity and stability in the temperature range above 150K. NEMS 2021: 1165-1168

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