"Electrode design optimization of a CMOS fringing-field capacitive sensor."

Yu-Ting Li et al. (2012)

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DOI: 10.1109/NEMS.2012.6196848

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Yu-Ting Li, Yen-Lin Tzeng, Chih-Ming Chao, Kerwin Wang:
Electrode design optimization of a CMOS fringing-field capacitive sensor. NEMS 2012: 603-606

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