"Humidity Sensor with High Resolution and Fast Response Based on AlN ..."

Dongsheng Li et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451433

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-29

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Dongsheng Li, Hanyong Dong, Zihao Xie, Mengjiao Qu, Qian Zhang, Jin Xie:
Humidity Sensor with High Resolution and Fast Response Based on AlN Cantilever with Two Groups of Segmented Electrodes. NEMS 2021: 1419-1422

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