"Integration of clamped-clamped suspended single-walled carbon nanotubes ..."

Shih-Wei Lee et al. (2011)

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DOI: 10.1109/NEMS.2011.6017289

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-04

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Shih-Wei Lee, M. Muoth, L. Durrer, Cosmin Roman, Christofer Hierold:
Integration of clamped-clamped suspended single-walled carbon nanotubes into SOI MEMS. NEMS 2011: 37-40

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