"Fabrication of micro temperature sensor and heater in a stainless ..."

Chi-Yuan Lee et al. (2009)

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DOI: 10.1109/NEMS.2009.5068552

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Chi-Yuan Lee, Shuo-Jen Lee, Wen-Pin Shih, Chen-Hen Lin, Chi-Chung Chang, Pei-Zen Chang:
Fabrication of micro temperature sensor and heater in a stainless steel-based micro reformer. NEMS 2009: 172-175

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