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"Optimization and fabrication of low stress-low temperature silicon oxide ..."
Abhijeet Kshirsagar, Siddhartha Prakash Duttagupta, Shashikala Achyut Gangal (2011)
- Abhijeet Kshirsagar, Siddhartha Prakash Duttagupta, Shashikala Achyut Gangal:
Optimization and fabrication of low stress-low temperature silicon oxide cantilevers. NEMS 2011: 466-470
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