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"Tentative bonding effect for maintaining alignment accuracy in bonding ..."
Masahiro Kondo et al. (2015)
- Masahiro Kondo, Hidetoshi Miyashita, Sang-Seok Lee, Nobuo Matsuoka:
Tentative bonding effect for maintaining alignment accuracy in bonding utilizing thick SU8 as an adhesive material. NEMS 2015: 487-490
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