"Double-side exposure UV-LED CNC lithography for fine 3D microfabrication."

Jungkwun J. K. Kim, Yong-Kyu Yoon, Mark G. Allen (2017)

Details and statistics

DOI: 10.1109/NEMS.2017.8017065

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-11

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