"MEMS resonant mass sensor with enabled optical trapping."

Ethan G. Keeler et al. (2017)

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DOI: 10.1109/NEMS.2017.8017104

access: closed

type: Conference or Workshop Paper

metadata version: 2022-11-07

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Ethan G. Keeler, Peifeng Jing, Jingda Wu, Chen Zou, Lih Y. Lin:
MEMS resonant mass sensor with enabled optical trapping. NEMS 2017: 639-643

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