"A Novel Peninsula-island Structure for Sensing Ultra-low Pressure Based on ..."

Mimi Huang et al. (2020)

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DOI: 10.1109/NEMS50311.2020.9265584

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-10

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Mimi Huang, Libo Zhao, Tingzhong Xu, Chen Jia, Ping Yang, Zhikang Li, Hongyan Wang, Yongshun Wu, Zhuangde Jiang:
A Novel Peninsula-island Structure for Sensing Ultra-low Pressure Based on Dry-wet Combination Etching Process. NEMS 2020: 167-170

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