"Fabrication metal roller mold with sub-micrometer feature size based on ..."

Kuo-Feng Huang, Sung-Wen Tsai, Yung-Chun Lee (2012)

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DOI: 10.1109/NEMS.2012.6196716

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Kuo-Feng Huang, Sung-Wen Tsai, Yung-Chun Lee:
Fabrication metal roller mold with sub-micrometer feature size based on contact printing photolithography. NEMS 2012: 31-35

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