"Dual-gate silicon carbide (SiC) lateral nanoelectromechanical switches."

Tina He et al. (2013)

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DOI: 10.1109/NEMS.2013.6559791

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-07

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Tina He, Rui Yang, Srihari Rajgopal, Swarup Bhunia, Mehran Mehregany, Philip X.-L. Feng:
Dual-gate silicon carbide (SiC) lateral nanoelectromechanical switches. NEMS 2013: 554-557

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