"Fabrication and characterization of 100-nm wide silicon nanocantilevers ..."

Samuel Guillon et al. (2011)

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DOI: 10.1109/NEMS.2011.6017343

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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Samuel Guillon, Daisuke Saya, Laurent Mazenq, Liviu Nicu, Sorin Perisanu, Pascal Vincent:
Fabrication and characterization of 100-nm wide silicon nanocantilevers using top-down approach. NEMS 2011: 258-261

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