"Laterally-excited bulk-wave resonators (XBARs) with embedded electrodes in ..."

Xiyu Gu et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451522

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Xiyu Gu, Jieyu Liu, Yao Cai, Yan Liu, Chao Gao, Zhiwei Wen, Shishang Guo, Chengliang Sun:
Laterally-excited bulk-wave resonators (XBARs) with embedded electrodes in 149.5° Z-cut LiNbO3. NEMS 2021: 931-934

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