"Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using ..."

Simon Chun Kiat Goh et al. (2018)

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DOI: 10.1109/NEMS.2018.8556967

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Simon Chun Kiat Goh, Li Lynn Shiau, Nan Chen, Kailiang Chuan, Beng Kang Tay, Chuan Seng Tan:
Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask. NEMS 2018: 652-655

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