"Effect of pressure on the Q factor and the resonance frequency of SiN ..."

Khashayar Babaei Gavan et al. (2009)

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DOI: 10.1109/NEMS.2009.5068600

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Khashayar Babaei Gavan, Joost van der Heijden, Emile W. J. M. van der Drift, Herre S. J. van der Zant:
Effect of pressure on the Q factor and the resonance frequency of SiN microcantilevers. NEMS 2009: 380-384

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