"Patterned Al-Ge Wafer Bonding for Reducing In-Process Side Leakage of ..."

Kai Gao et al. (2018)

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DOI: 10.1109/NEMS.2018.8556904

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-06

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Kai Gao, Qiyuan Zhang, Weiguo Su, Wei Zhang:
Patterned Al-Ge Wafer Bonding for Reducing In-Process Side Leakage of Eutectic. NEMS 2018: 332-335

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