"A novel LTCC capacitive accelerometer embedded in LTCC packaging substrate."

Hua Gan et al. (2011)

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DOI: 10.1109/NEMS.2011.6017474

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Hua Gan, Yufeng Jin, Min Miao, Xin Sun:
A novel LTCC capacitive accelerometer embedded in LTCC packaging substrate. NEMS 2011: 796-799

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