"Piezoresistivity characterization of silicon nanowires through monolithic ..."

Mohammad Nasr Esfahani, Yusuf Leblebici, B. Erdem Alaca (2017)

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DOI: 10.1109/NEMS.2017.8016978

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Mohammad Nasr Esfahani, Yusuf Leblebici, B. Erdem Alaca:
Piezoresistivity characterization of silicon nanowires through monolithic MEMS. NEMS 2017: 77-80

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