"One-step patterning of a flexible piezoresistive MEMS sensor by 3D direct ..."

Georges Dubourg et al. (2015)

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DOI: 10.1109/NEMS.2015.7147490

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  - conf/nems/DubourgZMC15
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  - https://dblp.org/rec/conf/nems/DubourgZMC15
Georges Dubourg, Cedo Zlebic, Jovan Matovic, Vesna Crnojevic-Bengin:
One-step patterning of a flexible piezoresistive MEMS sensor by 3D direct laser writing. NEMS 2015: 553-556

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