"Through Glass Vias by Wet-etching Process in 49% HF Solution Using an ..."

Guang-Hui Ding et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451296

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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Guang-Hui Ding, Binghe Ma, Yu-Chao Yan, Weizheng Yuan, Jinjun Deng, Jian Luo:
Through Glass Vias by Wet-etching Process in 49% HF Solution Using an AZ4620 Enhanced Cr/Au Mask. NEMS 2021: 872-875

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