"Fabrication and simulation of PDMS assisted CO2 laser ablation."

Chen-Kuei Chung et al. (2010)

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DOI: 10.1109/NEMS.2010.5592489

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-28

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Chen-Kuei Chung, S. L. Lin, K. C. Chang, H. Y. Wang:
Fabrication and simulation of PDMS assisted CO2 laser ablation. NEMS 2010: 650-653

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