"A capacitive micromachined ultrasonic transducer (CMUT) array with nickel ..."

Po-Fat Chong, Xiaomei Shi, Ching-Hsiang Cheng (2014)

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DOI: 10.1109/NEMS.2014.6908882

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-23

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Po-Fat Chong, Xiaomei Shi, Ching-Hsiang Cheng:
A capacitive micromachined ultrasonic transducer (CMUT) array with nickel membranes in a convex shape. NEMS 2014: 596-599

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