"Fabrication of controllable profile microlens array by nanoimprinting process."

M. C. Cheng, L. K. Chen, C. K. Sung (2012)

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DOI: 10.1109/NEMS.2012.6196834

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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M. C. Cheng, L. K. Chen, C. K. Sung:
Fabrication of controllable profile microlens array by nanoimprinting process. NEMS 2012: 542-546

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