"Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs."

Qiao Chen et al. (2013)

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DOI: 10.1109/NEMS.2013.6559850

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-02

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Qiao Chen, Hao Zhang, Xiaoyang Zhang, Dacheng Xu, Huikai Xie:
Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs. NEMS 2013: 817-820

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