"Broadband Piezoelectric Harvester Utilizing Three-wafer Bonding for ..."

Xin Chen et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451330

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Xin Chen, Daqiao Tong, Jian Zhang, Lingxiao Gao, Fayang Wang, Hongzhi Pan, Liang Cao, Xiaojing Mu:
Broadband Piezoelectric Harvester Utilizing Three-wafer Bonding for Self-powered Wireless Sensor System. NEMS 2021: 158-161

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