"An adaptive octree level set simulation method of the wet etching process ..."

Ye Chen et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451398

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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Ye Chen, Jin Qian, Xinyan Guo, Yan Xing:
An adaptive octree level set simulation method of the wet etching process for the fabrication of micro structure on sapphire crystal. NEMS 2021: 882-886

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