"A micromachined piezoelectric PZT-based cantilever in d33 mode."

Lingjuan Che et al. (2010)

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DOI: 10.1109/NEMS.2010.5592273

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Lingjuan Che, Einar Halvorsen, Xuyuan Chen, Xin Yan:
A micromachined piezoelectric PZT-based cantilever in d33 mode. NEMS 2010: 785-788

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