"A parametric study of ICP-RIE etching on a lithium niobate substrate."

Chun-Ming Chang et al. (2015)

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DOI: 10.1109/NEMS.2015.7147473

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  - conf/nems/ChangYHLHLKHHS15
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  - https://dblp.org/rec/conf/nems/ChangYHLHLKHHS15
Chun-Ming Chang, Chih-Sheng Yu, Fan-Chun Hsieh, Chun-Ting Lin, Tsung-Tao Huang, Ping-Hung Lin, Jiann-Shiun Kao, Chien-Nan Hsiao, Ming-Hua Shiao:
A parametric study of ICP-RIE etching on a lithium niobate substrate. NEMS 2015: 485-486

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