"Nano-scale mechanical relays fabricated by nanoimprint technology."

Y. J. Chang, D. Y. Liu, C. L. Kuo (2012)

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DOI: 10.1109/NEMS.2012.6196719

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Y. J. Chang, D. Y. Liu, C. L. Kuo:
Nano-scale mechanical relays fabricated by nanoimprint technology. NEMS 2012: 45-48

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