"Effect of oxidation on SGOI nanowire biosensor fabrication using Ge ..."

Kow-Ming Chang et al. (2012)

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DOI: 10.1109/NEMS.2012.6196873

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Kow-Ming Chang, Chu-Feng Chen, Chiung-Hui Lai, Chin-Ning Wu, Cheng-Ting Hsieh, Yu-Bin Wang, Chung-Hsien Liu:
Effect of oxidation on SGOI nanowire biosensor fabrication using Ge condensation. NEMS 2012: 708-711

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