"Design and fabrication of a MEMS scanning mirror with and without comb offset."

Yick Chuen Chan et al. (2010)

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DOI: 10.1109/NEMS.2010.5592180

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-13

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Yick Chuen Chan, Chun Cheong Wong, Congshun Wang, Wei Ma, Ho-Yin Chan, Shoulung Chen, Hon Lung Cheung, Francis Chee Shuen Lee, Chen-Jung Tsai:
Design and fabrication of a MEMS scanning mirror with and without comb offset. NEMS 2010: 186-190

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