"Processing and characteristics of piezoelectric microcantilevers without ..."

Ziping Cao, Jinya Zhang, Hiroki Kuwano (2010)

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DOI: 10.1109/NEMS.2010.5592254

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-13

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Ziping Cao, Jinya Zhang, Hiroki Kuwano:
Processing and characteristics of piezoelectric microcantilevers without substrate. NEMS 2010: 716-719

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