"Influence of Electrode Duty Factor on the Performance of Lamb-Wave AlN ..."

Haichao Cao, Hao Ren (2022)

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DOI: 10.1109/NEMS54180.2022.9791204

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-22

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Haichao Cao, Hao Ren:
Influence of Electrode Duty Factor on the Performance of Lamb-Wave AlN Resonators on SOI Substrate. NEMS 2022: 324-327

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