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"Wafer-scale nanostructure formation inside vertical nano-pores."
J. W. Berenschot et al. (2017)
- J. W. Berenschot, X. Sun, Hai Le The, R. M. Tiggelaar, M. J. de Boer, Jan C. T. Eijkel, J. G. E. Gardeniers, Niels R. Tas, Edin Sarajlic:
Wafer-scale nanostructure formation inside vertical nano-pores. NEMS 2017: 57-60
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