"A versatile multi-user polyimide surface micromachinning process for MEMS ..."

Arpys Arevalo et al. (2015)

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DOI: 10.1109/NEMS.2015.7147492

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-13

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  - conf/nems/ArevaloBCCIF15
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  - https://dblp.org/rec/conf/nems/ArevaloBCCIF15
Arpys Arevalo, E. Byas, David Conchouso, David Castro, Saad Ilyas, Ian G. Foulds:
A versatile multi-user polyimide surface micromachinning process for MEMS applications. NEMS 2015: 561-565

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