"Frequency Output, A multi-modes Vacuum Gauge with Highly Output linearity ..."

Chengxiang Wang et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451473

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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Chengxiang Wang, Yunbin Kuang, Yulie Wu, Zhanqiang Hou, Yongmeng Zhang, Xuezhong Wu, Dingbang Xiao:
Frequency Output, A multi-modes Vacuum Gauge with Highly Output linearity Based on Electrostatic Nonlinearity. NEMS 2021: 1888-1892

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