"A Non-Invasive Characterization Method for MEMS Based Devices."

Abbas Panahi et al. (2018)

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DOI: 10.1109/MWSCAS.2018.8623975

access: closed

type: Conference or Workshop Paper

metadata version: 2019-02-05

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Abbas Panahi, Ebrahim Ghafar-Zadeh, Sebastian Magierowski, Mohammad Hossein Sabour:
A Non-Invasive Characterization Method for MEMS Based Devices. MWSCAS 2018: 1094-1097

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