"A design flow to quantify and limit multiple patterning effects."

Mohammed Harb, Mohamed Dessouky (2015)

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DOI: 10.1109/MWSCAS.2015.7282106

access: closed

type: Conference or Workshop Paper

metadata version: 2020-03-26

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Mohammed Harb, Mohamed Dessouky:
A design flow to quantify and limit multiple patterning effects. MWSCAS 2015: 1-4

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