"Precise Visual Inspection Algorithm for LSI Wafer Patterns Using Grayscale ..."

Yukio Matsuyama et al. (1988)

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DOI: —

access: open

type: Conference or Workshop Paper

metadata version: 2020-03-12

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  - electronic edition @ mva-org.jp (open access)
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  dblp key:
  - conf/mva/MatsuyamaIKN88
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  - https://dblp.org/rec/conf/mva/MatsuyamaIKN88
Yukio Matsuyama, Hisafumi Iwata, Hitoshi Kubota, Yasuo Nakagawa:
Precise Visual Inspection Algorithm for LSI Wafer Patterns Using Grayscale Image Comparison. MVA 1988: 401-404

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